Hall Probes
The new developed Hall Probe type Lx for the SENIS F3A magnetic field transducers and digital teslameters has a ultra-thin probe tip (0.1 mm) with a naked Si-chip going out of the ceramic package.The probe body thickness is 0.5 mm. This fully integrated 3-axis Hall Probe is available in three different lengths: 1. Long version (LL): 71 mm, 2. Medium (LM): 47 mm, 3. Small (LS): 8 mm.The Hall Probe Lx for F3A Magnetic Transducers contains a CMOS integrated circuit, which incorporates three groups of mutually orthogonal Hall elements, biasing circuits, amplifiers, and a temperature sensor.The integrated Hall elements occupy very small area (150μm x 150μm), which provides very high spatial resolution of the probe.
The CMOS IC technology enables very high precision in the fabrication of the vertical and horizontal Hall elements, which gives high angular accuracy (orthogonality error < 0.1°) of the three measurement axes of the probe.The on- chip application of the spinning-current technique in the biasing of the Hall elements suppresses the planar Hall-effect.The on-chip signal pre-processing enables a very high frequency bandwidth (DC up to 25 kHz) of the probe, and on- chip signal amplification provides high output signals of the Hall probe.The sensor chip is embedded in the probe package and connected to the CaH cable.The outputs of the Hall Probe are high-level analog voltages proportional with each of the measured components of a magnetic flux density and a voltage proportional with the probe temperature.